DEPTH DISTRIBUTION OF DEFECTS AND IMPURITIES IN DIAMOND AND CUBIC BORON-NITRIDE AFTER HIGH-ENERGY ION-IMPLANTATION

被引：24

作者：

BURENKOV, AF ^{[1
]}

VARYCHENKO, VS ^{[1
]}

ZAITSEV, AM ^{[1
]}

KOMAROV, FF ^{[1
]}

KONOPLYANIK, GG ^{[1
]}

MELNIKOV, AA ^{[1
]}

STELMAKH, VF ^{[1
]}

TKACHEV, VV ^{[1
]}

机构：

[1] BELORUSSIAN STATE UNIV,DEPT PHYS SEMICOND,MINSK 220080,BELORUSSIA,USSR

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1989年 / 115卷 / 02期

关键词：

D O I：

10.1002/pssa.2211150208

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：427 / 435

页数：9

共 8 条

[1] BURENKOV AF, 1985, ENERGOIZDAT
[2] Clark C. D., 1971, Radiation Effects, V9, P219, DOI 10.1080/00337577108231052
[3] Gippius A.A., 1982, FORMATION ANNEALING, V16, P404
[4] VAVILOV VS, 1982, FIZ TVERD TELA, V16, P1996
[5] VAVILOV VS, 1985, ELECTRON OPTICAL PRO
[6] CATHODOLUMINESCENCE OF ELECTRON-IRRADIATED CUBIC BORON-NITRIDE
ZAITSEV, AM
MELNIKOV, AA
SHIPLO, VB
SHISHONOK, EM
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1986, 94 (02): : K125 - K127
[7] ZAITSEV AM, 1982, FIZ TEKH POLUPROV, V16, P397
[8] Ziegler J.F., 1985, STOPPING RANGE IONS