SIMULATION OF ION REFLECTION FROM A SINGLE-CRYSTAL AT GRAZING ANGLES

Features of ion scattering for small angles of incidence, up to about 10 degree from the surface, have been examined for 6 keV Ar** plus ions in a plane of incidence parallel to the 001 bar direction in the nickel (110) surface. Ions scattered between the surface layer atoms, either above the surface, or slightly below the surface in the semi-channel make a significant contribution to the reflected beam. The angular dependence of experimentally measured energy spectra can be explained when these scattering events are taken into account. In this region of small elastic energy loss and long path lengths close to the surface, inelastic energy losses assume an important role in determining the energy distribution of the scattered particles.