DIFFUSE X-RAY-SCATTERING FROM SMALL DEFECTS IN A VERY PERFECT SILICON SINGLE-CRYSTAL

被引:9
作者
HARADA, J [1 ]
WAKAMATSU, K [1 ]
YASUAMI, S [1 ]
机构
[1] TOSHIBA RES & DEV CTR,1 KOMUKAI TOSHIBACHO,SAIWAIKU,KAWASAKI 210,JAPAN
关键词
D O I
10.1063/1.90044
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:271 / 272
页数:2
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