SIMULATIONS OF ELECTRON ORBITS IN A BUCKET-TYPE ION-SOURCE

被引：9

作者：

IDO, S

HASEBE, H

FUJITA, Y

机构：

[1] Department of Electrical Engineering, Saitama University, Urawa, 338

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1993年 / 32卷 / 10期

关键词：

ELECTRON ORBIT SIMULATION; ION SOURCE; ELECTRON LIFETIME; COLLISIONS; IONIZATION POINT; EXCITATION; ELASTIC COLLISION; RUNGE-KUTTA-GILL METHOD; MONTE-CARLO METHOD;

D O I：

10.1143/JJAP.32.4761

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We developed a simulation code to calculate electron orbits with collisions between electrons and argon gas atoms. Simulations are applied to trace electron orbits in a bucket-type ion source. This paper introduces the numerical model. It discusses the lifetime of primary electrons and the effects of collisions.

引用

页码：4761 / 4767

页数：7

共 5 条

[1] TOTAL CROSS-SECTIONS FOR ELECTRON-SCATTERING BY NE, AR, KR AND XE [J].