SELECTIVE PETROL VAPOR SENSOR-BASED ON AN FE2O3 THIN-FILM

被引：19

作者：

POGHOSSIAN, AS

ABOVIAN, HV

AROUTIOUNIAN, VM

机构：

[1] State Engineering University of Armenia, Yerevan, 375009

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1994年 / 18卷 / 1-3期

关键词：

D O I：

10.1016/0925-4005(94)87075-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The gas-sensing characteristics of Fe2O3 thin films prepared by the electron-beam evaporation method are presented. The Fe2O3 films show a high selectivity and sensitivity to petrol vapours. The response and recovery times and reproducibility of the gas-sensitive elements are studied. The obtained results shows the possibility of using Fe2O3 thin films as material for semiconductor thin-film petrol vapour sensors.

引用

页码：155 / 157

页数：3