FATIGUE OF FERROELECTRIC PBZRXTIYO3 CAPACITORS WITH RU AND RUOX ELECTRODES

The fatigue behavior of ferroelectric PZT capacitors with Ru and RuOx electrodes was studied. These capacitors show no sign of fatigue out to 1 X 10(11) cycles, in sharp contrast to the degradation typically observed with Pt electrodes. Compared to Pt electrodes, the initial polarization was lower, but after fatiguing the polarization was comparable to or larger than that for Pt electrodes. Differences in polarization in response to switching and nonswitching pulses greater than 10 muC/cm2 were observed at 1 X 10(11) cycles.