AN ANALYSIS OF POLARIZATION MIXING ERRORS IN DISTANCE MEASURING INTERFEROMETERS
被引:32
作者:
AUGUSTYN, W
论文数: 0引用数: 0
h-index: 0
机构:
WORCESTER POLYTECH INST,DEPT MATH SCI,WORCESTER,MA 01609WORCESTER POLYTECH INST,DEPT MATH SCI,WORCESTER,MA 01609
AUGUSTYN, W
[1
]
DAVIS, P
论文数: 0引用数: 0
h-index: 0
机构:
WORCESTER POLYTECH INST,DEPT MATH SCI,WORCESTER,MA 01609WORCESTER POLYTECH INST,DEPT MATH SCI,WORCESTER,MA 01609
DAVIS, P
[1
]
机构:
[1] WORCESTER POLYTECH INST,DEPT MATH SCI,WORCESTER,MA 01609
来源:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
|
1990年
/
8卷
/
06期
关键词:
D O I:
10.1116/1.584868
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Many distance measuring interferometers use orthogonally polarized beams in their reference and measurement arms. In practice, instrumental imperfections corrupt the polarized beam in each arm with a small amplitude signal from the other arm having the perpendicular polarization. The impact of this polarization mixing on the absolute accuracy of a single frequency laser interferometer is shown to be significantly smaller than on the accuracy of a two-frequency interferometer. Certain signals obtained from a single-frequency interferometer have no phase error due to polarization mixing. Other signals are affected in proportion to the ratio between the small mixing amplitudes and the primary polarization amplitudes. Roughly, those errors in the single frequency device depend on the square of the small mixing ratios while the error in the two frequency interferometer depends on a larger quantity, the sum of these ratios. For a mixing ratio of 0.1, the error in the single-frequency interferometer is about 20 times smaller than in the heterodyne interferometer.