MICROLITHOGRAPHY - KEY TO SOLID-STATE DEVICE FABRICATION

[1] ANGEL D, 1978, OCT KOD MICR SEM SAN

[2] REPLICATION OF RELIEF-PHASE HOLOGRAMS FOR PRERECORDED VIDEO [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) : 1408 - 1413

[3] BROERS AN, 1977, JUN P INT C MICR LIT, P21

[4] CAPECE RP, 1978, ELECTRONICS, V51, P111

[5] DECKERT CA, 1980, SOLID STATE TECHNOL, V23, P76

[6] DECKERT CA, 1978, P KODAK MICROELECTRO, P3

[7] DEFOREST WS, 1975, PHOTORESIST MATERIAL

[8] EDER JM, 1945, HISTORY PHOTOGRAPHY

[9] GERNSHEIM H, 1969, HISTORY PHOTOGRAPHY

[10] GESHNER RA, 1978, RCA ENG, V24, P47

[1] ANGEL D, 1978, OCT KOD MICR SEM SAN

[2] REPLICATION OF RELIEF-PHASE HOLOGRAMS FOR PRERECORDED VIDEO [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) : 1408 - 1413

[3] BROERS AN, 1977, JUN P INT C MICR LIT, P21

[4] CAPECE RP, 1978, ELECTRONICS, V51, P111

[5] DECKERT CA, 1980, SOLID STATE TECHNOL, V23, P76

[6] DECKERT CA, 1978, P KODAK MICROELECTRO, P3

[7] DEFOREST WS, 1975, PHOTORESIST MATERIAL

[8] EDER JM, 1945, HISTORY PHOTOGRAPHY

[9] GERNSHEIM H, 1969, HISTORY PHOTOGRAPHY

[10] GESHNER RA, 1978, RCA ENG, V24, P47