THE KINETICS OF TUNGSTEN ETCHING BY ATOMIC AND MOLECULAR CHLORINE

被引：16

作者：

BALOOCH, M ^{[1
]}

FISCHL, DS ^{[1
]}

OLANDER, DR ^{[1
]}

SIEKHAUS, WJ ^{[1
]}

机构：

[1] UNIV CALIF LAWRENCE LIVERMORE NATL LAB,LIVERMORE,CA 94550

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 08期

关键词：

ELEY-RIDEAL MECHANISM - MOLECULAR CHLORINE - PROCESS VARIABLE EFFECTS - TUNGSTEN ETCHING;

D O I：

10.1149/1.2096215

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2090 / 2095

页数：6

共 20 条

[1] REACTIONS OF CHLORINE WITH LIQUID-METALS .1. INDIUM [J].

BALOOCH, M ;

SIEKHAUS, WJ ;

OLANDER, DR .

JOURNAL OF PHYSICAL CHEMISTRY, 1984, 88 (16) :3521-3528

[2]

BALOOCH M, 1986, J PHYS CHEM-US, V90, P1671, DOI 10.1021/j100399a043

[3] QUASIEQUILIBRIUM TREATMENT OF GAS-SOLID REACTIONS .I. EVAPORATION RATES OF VOLATILE SPECIES FORMED IN REACTION OF O2 WITH W, MO, AND C [J].

BATTY, JC ;

STICKNEY, RE .

JOURNAL OF CHEMICAL PHYSICS, 1969, 51 (10) :4475-&

[4] DESORPTION OF HALOGENS FROM SOME NB, MO, TA AND W SINGLE-CRYSTAL SURFACES [J].

BOLBACH, G ;

BLAIS, JC .

SURFACE SCIENCE, 1984, 137 (01) :327-338

[5] CL ADSORPTION LAYERS ON W(110) AND (111) SURFACES [J].

BONCZEK, F ;

ENGEL, T ;

BAUER, E .

SURFACE SCIENCE, 1980, 97 (2-3) :595-608

[6] THE INTERACTION OF CL2 WITH BI(0001) - INCIPIENT BICL3 FORMATION AND DECOMPOSITION [J].

CAMPBELL, CT ;

TAYLOR, TN .

SURFACE SCIENCE, 1982, 122 (01) :119-136

[7] REACTIVE SCATTERING FROM SOLID SURFACES [J].

D'Evelyn, Mark P. ;

Madix, Robert J. .

SURFACE SCIENCE REPORTS, 1983, 3 (08) :413-495

[8] ADSORPTION OF ELEMENTS WITH A PARTIALLY FILLED P-VALENCE SHELL ON TRANSITION-METALS [J].

DESJONQUERES, MC ;

SPANJAARD, D .

JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1983, 16 (17) :3389-3408

[9] ETCHING OF TUNGSTEN AND TUNGSTEN SILICIDE FILMS BY CHLORINE ATOMS [J].

FISCHL, DS ;

RODRIGUES, GW ;

HESS, DW .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (08) :2016-2019

[10] INVESTIGATION OF GAS-SOLID REACTIONS BY MODULATED MOLECULAR-BEAM MASS-SPECTROMETRY [J].

JONES, RH ;

OLANDER, DR ;

SCHWARZ, JA ;

SIEKHAUS, WJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06) :1429-&

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