MORPHOLOGY AND STRUCTURE OF TIO2 THIN-LAYERS VS THICKNESS AND SUBSTRATE-TEMPERATURE

被引:94
作者
LOTTIAUX, M
BOULESTEIX, C
NIHOUL, G
VARNIER, F
FLORY, F
GALINDO, R
PELLETIER, E
机构
[1] FAC SCI ST JEROME,INTERACT PHOTON MAT LAB,F-13397 MARSEILLE 13,FRANCE
[2] ECOLE NATL SUPER PHYS,OPT SURFACES & COUCHES MINCES LAB,UA 1120,F-13397 MARSEILLE 13,FRANCE
[3] UNIV TOULON & VAR,GMET,UA 797,F-83130 LA GARDE,FRANCE
关键词
D O I
10.1016/0040-6090(89)90627-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:107 / 126
页数:20
相关论文
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