The reaction mechanism of photo-induced electron transfer reactions from hexamethyldisilane to quinones in chloroform solution was studied at room temperature by means of a CIDNP technique. With irradiation, the formation of the corresponding mono- and di-trimethylsilyl hydroquinones and trimethylsilyl chloride was confirmed by GC, GC-MS, and H-1 NMR spectra. The absorptive CIDNP phase of the mono-trimethylsilyl hydroquinone indicates that this reaction precursor is the triplet radical ion pair of the hexamethyldisilane cation radical and quinone anion radical, and that the former radical reacts with the latter prior to the fission of its Si-Si bond.