AN ENERGY-DEPENDENT 2-DIMENSIONAL SUBSTRATE CURRENT MODEL FOR THE SIMULATION OF SUBMICROMETER MOSFETS

被引:14
作者
AGOSTINELLI, VM [1 ]
BORDELON, TJ [1 ]
WANG, XL [1 ]
YEAP, CF [1 ]
MAZIAR, CM [1 ]
TASCH, AF [1 ]
机构
[1] INTEL CORP,SANTA CLARA,CA 95052
关键词
D O I
10.1109/55.192837
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A multicurrent contour, average-energy-based, substrate current model for silicon submicrometer NMOS FET's is presented as a significant improvement to the local-field model that is commonly used in modern drift-diffusion device simulators. The model is implemented as a post-processor by applying a one-dimensional energy conservation equation to many current contours in order to generate a two-dimensional representation of average energy and impact ionization rate which is integrated to calculate the substrate current. Comparisons of simulations and experimental I-V curves for both simple and LDD MOSFET's are presented. Outstanding agreement has been obtained over a wide range of bias conditions and channel lengths.
引用
收藏
页码:554 / 556
页数:3
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