STUDY OF THIN-FILMS OF TANTALUM OXIDE BY THERMAL CURRENT METHOD

被引:4
作者
SEVE, G [1 ]
LASSABATERE, L [1 ]
机构
[1] UNIV SCI & TECHNIQUES LANGUEDOC, CNRS, CTR ETUD ELECTR SOLIDES, MONTPELLIER, FRANCE
关键词
D O I
10.1016/0040-6090(73)90184-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:285 / 301
页数:17
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