CHARACTERIZATION OF A HUMIDITY SENSOR THAT INCORPORATES A CMOS CAPACITANCE MEASURING CIRCUIT

被引：11

作者：

SILVERTHORNE, SV

WATSON, CW

BAXTER, RD

机构：

来源：

SENSORS AND ACTUATORS | 1989年 / 19卷 / 04期

关键词：

D O I：

10.1016/0250-6874(89)87086-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：371 / 383

页数：13

共 10 条

[1]

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GRANGE, H ;

CHAMBAZ, B ;

DESTANNES, L .

SENSORS AND ACTUATORS, 1983, 4 (01) :97-104

[3]

DENTON DD, 1985, MOISTURE HUMIDITY, P505

[4]

Glenn M. C., 1985, 3 INT C SOL STAT SEN, P217

[5] A CAPACITIVE HUMIDITY SENSOR WITH VERY FAST RESPONSE-TIME AND VERY LOW HYSTERESIS [J].

GRANGE, H ;

BIETH, C ;

BOUCHER, H ;

DELAPIERRE, G .

SENSORS AND ACTUATORS, 1987, 12 (03) :291-296

[6] HUMIDITY FIXED-POINTS OF BINARY SATURATED AQUEOUS-SOLUTIONS [J].

GREENSPAN, L .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1977, 81 (01) :89-96

[7]

HIJIKIGAWA M, 1985, 3RD INT C SOL STAT S, P221

[8]

HODGES D, 1980, ANALOG MOS INTEGRATE, P2

[9]

SASHIDA T, 1985, MOSITURE HUMIDITY MA, P525

[10]

SILVERTHORNE S, 1988, JUN SOL STAT SEN ACT, P67

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