POLYIMIDE OPTICAL WAVE-GUIDES FABRICATED WITH ELECTRON-BEAM LITHOGRAPHY

被引：12

作者：

ROOKS, MJ ^{[1
]}

ROUSSELL, HV ^{[1
]}

JOHNSON, LM ^{[1
]}

机构：

[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173

来源：

APPLIED OPTICS | 1990年 / 29卷 / 27期

关键词：

D O I：

10.1364/AO.29.003880

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Fabrication ofPMMA clad polyimide waveguides by electron beam lithography creates very smooth sidewalls allowing production of narrow low loss waveguides on planar substrates. © 1990 Optical Society of America.

引用

页码：3880 / 3882

页数：3

共 17 条

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[8] RADIANT CURED POLYMER OPTICAL WAVE-GUIDES ON PRINTED-CIRCUIT BOARDS FOR PHOTONIC INTERCONNECTION USE
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[J]. APPLIED OPTICS, 1989, 28 (01): : 40 - 47
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