RF SPUTTERING OF YTTRIA ON INDIUM TIN OXIDE SUBSTRATES

[1] Glang LI, 1970, HDB THIN FILM TECHNO, P4

[2] HOFFMAN V, 1978, OPTICAL SPECTRA NOV, P60

[3] Maissel L.I., 1970, HDB THIN FILM TECHNO, P1

[4] PANICKER MPR, 1980, P INT S SOC INFORMAT

[5] Reed T. B., 1971, FREE ENERGY FORMATIO

[6] STEELE GH, 1971, Patent No. 3560784

[7] ELECTRICAL PROPERTIES AND DEFECT STRUCTURE OF Y2O3 [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1966, 49 (08) : 401 - &

[8] DIELECTRIC PROPERTIES OF Y2O3 THIN FILMS PREPARED BY VACUUM EVAPORATION [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1970, 9 (07) : 735 - &

[9] 1972, EL7720903 JOINT ARM

[1] Glang LI, 1970, HDB THIN FILM TECHNO, P4

[2] HOFFMAN V, 1978, OPTICAL SPECTRA NOV, P60

[3] Maissel L.I., 1970, HDB THIN FILM TECHNO, P1

[4] PANICKER MPR, 1980, P INT S SOC INFORMAT

[5] Reed T. B., 1971, FREE ENERGY FORMATIO

[6] STEELE GH, 1971, Patent No. 3560784

[7] ELECTRICAL PROPERTIES AND DEFECT STRUCTURE OF Y2O3 [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1966, 49 (08) : 401 - &

[8] DIELECTRIC PROPERTIES OF Y2O3 THIN FILMS PREPARED BY VACUUM EVAPORATION [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1970, 9 (07) : 735 - &

[9] 1972, EL7720903 JOINT ARM