ORGANOMETALLIC MOLECULES FOR SEMICONDUCTOR FABRICATION

被引：9

作者：

SHENAIKHATKHATE, DV ^{[1
]}

PARKER, MB ^{[1
]}

MCQUEEN, AED ^{[1
]}

MULLIN, JB ^{[1
]}

COLEHAMILTON, DJ ^{[1
]}

机构：

[1] ROYAL SIGNALS & RADAR ESTAB, MALVERN WR14 3PS, WORCS, ENGLAND

来源：

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 1990年 / 330卷 / 1610期

关键词：

D O I：

10.1098/rsta.1990.0011

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：173 / 182

页数：10

共 22 条

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