PARAMETRIC STUDY OF THE CHEMICAL-VAPOR-DEPOSITION OF CARBON-BORON-NITROGEN COMPOUNDS

被引:22
作者
DERRE, A
FILIPOZZI, L
BOUYER, F
MARCHAND, A
机构
[1] Centre de Recherche Paul Pascal, CNRS, Pessac, 33600, Avenue Albert Schweitzer
关键词
D O I
10.1007/BF00368931
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The influence of various parameters controlling the chemical vapour deposition of carbon-boron-nitrogen mixtures has been studied using the experimental designs methodology which provides a valuable phenomenological approach for the initial study of complicated chemical systems. The gaseous precursors used were acetylene (C2H2), boron trichloride (BCl3), and ammonia (NH3). An extended experimental field was investigated, which leads to a very wide composition range for the deposits. All the deposits may be described as hexagonal single phase, including the C-BN-''BC3'' ternary domain. In this composition triangle, no thermodynamically stable boron carbides were found.
引用
收藏
页码:1589 / 1594
页数:6
相关论文
共 21 条
[1]  
BADZIAN AR, 1972, 3RD P INT C CHEM VAP, P747
[2]   CHEMICAL VAPOR-DEPOSITION IN THE BORON-CARBON-NITROGEN SYSTEM [J].
BESMANN, TM .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (08) :2498-2501
[3]  
Box G. E. P., 1963, DESIGN ANAL IND EXPT
[4]   2K-P FRACTIONAL FACTORIAL DESIGNS .1. [J].
BOX, GE ;
HUNTER, JS .
TECHNOMETRICS, 1961, 3 (03) :311-&
[5]  
CHEN SH, 1980, 3RD P INT CARB C BAD, P44
[6]   HIGH-TEMPERATURE BORON CARBONITRIDE BASED CERAMICS [J].
DUBOVIK, TV ;
ANDREEVA, TV .
JOURNAL OF THE LESS-COMMON METALS, 1986, 117 (1-2) :265-269
[7]   BORON-CARBON-NITROGEN MATERIALS OF GRAPHITE-LIKE STRUCTURE [J].
KANER, RB ;
KOUVETAKIS, J ;
WARBLE, CE ;
SATTLER, ML ;
BARTLETT, N .
MATERIALS RESEARCH BULLETIN, 1987, 22 (03) :399-404
[8]   A NOVEL GRAPHITE-LIKE MATERIAL OF COMPOSITION BC3, AND NITROGEN-CARBON GRAPHITES [J].
KOUVETAKIS, J ;
KANER, RB ;
SATTLER, ML ;
BARTLETT, N .
JOURNAL OF THE CHEMICAL SOCIETY-CHEMICAL COMMUNICATIONS, 1986, (24) :1758-1759
[9]  
Kouvetakis J, 1989, SYNTHETIC MET, V34, P1
[10]   SOLID SOLUTION OF BORON IN GRAPHITE [J].
LOWELL, CE .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1967, 50 (03) :142-&