METAL-VAPOR PRODUCTION BY SPUTTERING IN A HOLLOW-CATHODE DISCHARGE - THEORY AND EXPERIMENT

被引:92
作者
WARNER, BE [1 ]
PERSSON, KB [1 ]
COLLINS, GJ [1 ]
机构
[1] COLORADO STATE UNIV,DEPT ELECT ENGN,FT COLLINS,CO 80523
关键词
D O I
10.1063/1.326758
中图分类号
O59 [应用物理学];
学科分类号
摘要
Laser action in singly ionized metal atoms has been obtained when a rare gas is excited in a metal hollow cathode. The required metal-vapor density is produced by discharge sputtering from the cathode and the excitation of upper levels occurs via a charge-transfer reaction of the type B++M → (M+)+B+ΔE. We present a unified discharge-sputtering theory which describes the metal density created in the hollow cathode, including both the current and spatial dependence. The predictions of this model are then compared to the measured dependence of metal-vapor density with current, spatial position, and buffer-gas pressure. Discharge conditions which support laser oscillation are emphasized. Agreement between theory and experiment is good.
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页码:5694 / 5703
页数:10
相关论文
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