DISTORTION OF DEPTH PROFILES DURING ION-BOMBARDMENT .2. MIXING MECHANISMS

被引：95

作者：

GRASMARTI, A

SIGMUND, P

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1981年 / 180卷 / 01期

关键词：

D O I：

10.1016/0029-554X(81)90032-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：211 / 219

页数：9

共 22 条

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LITTMARK, U ;

HOFER, WO .

NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3) :329-342

[9] ION-BEAM SPUTTERING - EFFECT OF INCIDENT ION ENERGY ON ATOMIC MIXING IN SUBSURFACE LAYERS [J].

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