SURFACE CHARACTERIZATION OF a-AXIS EuBa2Cu3O7-y THIN FILMS

被引：2

作者：

Asano, H. ^{[1
]}

Asahi, M. ^{[1
]}

Suzuki, M. ^{[1
]}

Kimachi, Y. ^{[1
]}

机构：

[1] NTT Interdisciplinary Res Labs, Tokai, Ibaraki 31911, Japan

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1993年 / 3卷 / 01期

关键词：

D O I：

10.1109/77.233387

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The surface characterization of a-axis EuBa2Cu3O7-y (EBCO) films sputtered onto SrTiO3 (001) has been performed with a view to developing fabrication techniques for multilayer devices. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) studies indicate that a-axis EBCO films have fairly smooth surfaces. In addition, a electron cyclotron resonance (ECR) ion beam is used for surface cleaning of a-axis EBCO films. Surface analysis using X-ray photoelectron spectroscopy (XPS), and reflection high-energy electron diffraction (RIMED) shows that the ECR oxygen ion beam treatment reduces the contaminated layer on a film surface and leaves a crystalline surface with an improved surface chemistry. ECR treatment at room temperature can result in reduced silver-contact resistivities in the 10(-8)-10(-7) Omega cm(2) range. The surface processing using an ECR source would be useful in the fabrication of high-T-c multilayer devices.

引用

页码：1290 / 1293

页数：4

共 14 条

[1] EPITAXY AND ORIENTATION OF EU1BA2CU3O7-Y FILMS GROWN INSITU BY MAGNETRON SPUTTERING [J].

ASANO, H ;

ASAHI, M ;

MICHIKAMI, O .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (06) :L981-L983

[2] FABRICATION OF EU1BA2CU3OY THIN-FILMS AND TUNNEL-JUNCTIONS BY MAGNETRON SPUTTERING [J].

ASANO, H ;

YONEZAWA, H ;

ASAHI, M ;

MICHIKAMI, O .

IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (02) :844-847

[3]

Cuoma J. J., 1989, HDB ION BEAM PROCESS

[4] HIGH-TC SUPERCONDUCTOR NOBLE-METAL CONTACTS WITH SURFACE RESISTIVITIES IN THE 10-10 OMEGA-CM2 RANGE [J].

EKIN, JW ;

LARSON, TM ;

BERGREN, NF ;

NELSON, AJ ;

SWARTZLANDER, AB ;

KAZMERSKI, LL ;

PANSON, AJ ;

BLANKENSHIP, BA .

APPLIED PHYSICS LETTERS, 1988, 52 (21) :1819-1821

[5] PASSIVATION OF HIGH-TC SUPERCONDUCTOR SURFACES WITH CAF2 AND BI, AL, AND SI OXIDES [J].

HILL, DM ;

MEYER, HM ;

WEAVER, JH ;

NELSON, DL .

APPLIED PHYSICS LETTERS, 1988, 53 (17) :1657-1659

[6] GOLD CONTACTS ON SUPERCONDUCTING CRYSTALS OF YBA2CU3O7 WITH VERY LOW CONTACT RESISTIVITY [J].

JING, TW ;

WANG, ZZ ;

ONG, NP .

APPLIED PHYSICS LETTERS, 1989, 55 (18) :1912-1914

[7]

Kimachi Y., IN PRESS

[8]

Liu Y. P., 1989, APPL PHYS LETT, V66, P5514

[9] CHARACTERIZATION OF BILAYER-METAL CONTACTS TO HIGH-TC SUPERCONDUCTING FILMS [J].

MA, QY ;

SCHMIDT, MT ;

WEINMAN, LS ;

YANG, ES ;

SAMPERE, SM ;

CHAN, SW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03) :390-404

[10] ELECTRONIC-STRUCTURES OF THE YBA2CU3O7-X SURFACE AND ITS MODIFICATION BY SPUTTERING AND ADATOMS OF TI AND CU [J].

MEYER, HM ;

HILL, DM ;

WAGENER, TJ ;

GAO, Y ;

WEAVER, JH ;

CAPONE, DW ;

GORETTA, KC .

PHYSICAL REVIEW B, 1988, 38 (10) :6500-6512

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