INFRARED-LASER INDUCED PRODUCTION OF SILICON COATING VIA REACTION OF SILANE WITH TRIFLUOROACETIC-ACID

被引：15

作者：

POLA, J

BASTL, Z

TLASKAL, J

机构：

[1] CZECHOSLOVAK ACAD SCI,HEYROVSKY INST PHYS CHEM & ELECTROCHEM,CS-18223 PRAGUE 8,CZECHOSLOVAKIA

[2] CZECHOSLOVAK ACAD SCI,INST INORGAN CHEM,CS-25068 REZ,CZECHOSLOVAKIA

来源：

INFRARED PHYSICS | 1990年 / 30卷 / 04期

关键词：

D O I：

10.1016/0020-0891(90)90052-W

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Irradition of gaseous mixtures of silane and trifluoroacetic acid by TEA CO2 laser results in the formation of gaseous products and solid deposits that are inferred, on the basis of IR and ESCA analysis, to consist of Si, C, O and F atoms. © 1990.

引用

页码：355 / 357

页数：3

共 12 条

[1]

ALEXANDRESCU R, 1988, APPL PHYS A, V46, P768

[2] MONOSILYLPHOSPHINE FORMATION BY RAPID SILYLENE INSERTION IN THE IR PHOTOCHEMISTRY OF SIH4-PH3 MIXTURES [J].

BLAZEJOWSKI, J ;

LAMPE, FW .

JOURNAL OF PHOTOCHEMISTRY, 1982, 20 (01) :9-16

[3] THE SYNTHESIS AND APPLICATIONS OF FLUORINATED SILICONES, NOTABLY IN HIGH-PERFORMANCE COATINGS [J].

BOUTEVIN, B ;

PIETRASANTA, Y .

PROGRESS IN ORGANIC COATINGS, 1985, 13 (05) :297-331

[4] INFRARED-LASER PHOTOCHEMISTRY OF SILANE [J].

DEUTSCH, TF .

JOURNAL OF CHEMICAL PHYSICS, 1979, 70 (03) :1187-1192

[5] PREPARATION AND PROPERTIES OF SOME SILYL ESTERS [J].

EBSWORTH, EA ;

THOMPSON, JC .

JOURNAL OF THE CHEMICAL SOCIETY A -INORGANIC PHYSICAL THEORETICAL, 1967, (01) :69-&

[6] SINGLE PULSE LASER-INDUCED REACTIONS OF HEXAFLUOROBENZENE SILANE MIXTURES AT 1027 AND 944 CM-1 [J].

KOGA, Y ;

SERINO, RM ;

CHEN, R ;

KEEHN, PM .

JOURNAL OF PHYSICAL CHEMISTRY, 1987, 91 (02) :298-305

[7] INFRARED MULTI-PHOTON DECOMPOSITION OF MONOSILANE [J].

LONGEWAY, PA ;

LAMPE, FW .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1981, 103 (23) :6813-6818

[8]

PAPOUSKOVA Z, IN PRESS J MACROMOL

[9] CW-CO2 LASER-INDUCED AND SF6-SENSITIZED DECOMPOSITION OF TRIFLUOROACETIC-ACID [J].

POLA, J .

COLLECTION OF CZECHOSLOVAK CHEMICAL COMMUNICATIONS, 1981, 46 (11) :2854-2859

[10] INFRA-RED SPECTRA OF SOME SILYL ESTERS [J].

ROBIETTE, AG ;

THOMPSON, JC .

SPECTROCHIMICA ACTA, 1965, 21 (12) :2023-&

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