INORGANIC VOLATILE FLUORIDES OBTAINED FROM ELECTRICAL DECOMPOSITION OF SULFUR-HEXAFLUORIDE IN A QUARTZ TUBE

Recent investigations on sulfur hexafluoride decomposition have shown the need of a rapid and efficient method for the qualitative and quantitative analysis of the reaction products. An analytical method for characterizing the gas mixture obtained from the decomposition of sulfur hexafluoride in a quartz reactor submitted to an r.f. discharge, is presented. A combination of gas-chromatographic, mass spectrometric and infrared spectrophotometric techniques has shown the presence of SF6, SO2F2, SOF4, SOF2, SiF4 and F2 in the gas mixtures examined. For quantitative purposes a gas-chromatographic method has been found to be most suitable. © 1979.