EFFECT OF BAKEOUT TEMPERATURE ON THE ELECTRON AND ION INDUCED GAS DESORPTION COEFFICIENTS OF SOME TECHNOLOGICAL MATERIALS

被引：31

作者：

ACHARD, MH ^{[1
]}

CALDER, R ^{[1
]}

MATHEWSON, A ^{[1
]}

机构：

[1] CERN,CH-1211 GENEVA 23,SWITZERLAND

来源：

VACUUM | 1979年 / 29卷 / 02期

关键词：

D O I：

10.1016/S0042-207X(79)80335-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The electron and ion induced neutral gas desorption coefficients at 1.4 keV have been measured for stainless steel, Inconel 600, Inconel 718, a titanium alloy, OFHC copper and an aluminium alloy after bakeout at temperatures ranging from 150 to 600°C. The surface composition was also determined by Auger spectroscopy after heating at various temperatures up to 1000°C. The similarity of the results from all the materials investigated was explained in terms of a porous surface oxide layer which provided a reservoir for desorbable gas. © 1979 Pergamon Press Ltd.

引用

页码：53 / 65

页数：13

共 14 条

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