MICROWAVE PERFORMANCE-PROPERTY RELATIONSHIPS OF YBA2CU3O7-DELTA THIN-FILMS GROWN ON LAALO3 (001) SUBSTRATE

被引：11

作者：

YOUNG, KH

SUN, JZ

EDDY, MM

INAM, A

机构：

[1] SUPERCOND TECHNOL INC,SANTA BARBARA,CA 93111

[2] BELL COMMUN RES INC,RED BANK,NJ 07701

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1992年 / 21卷 / 05期

关键词：

YBCO THIN FILM GROWTH; LASER ABLATION; MICROWAVE PROPERTIES;

D O I：

10.1007/BF02655612

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report correlations between growth parameters, structure and microwave performance for YBa2Cu3O7-delta (YBCO) thin films. Two series of YBCO thin films were grown by in-situ laser ablation. The first series were deposited at 100 mTorr oxygen pressure with a laser fluence of 2.9 Joule/cm2, the second series were deposited at 600 mTorr of oxygen and a higher laser fluence of 5 Joule/cm2. Microwave performance of these films was evaluated using a 5.6 GHz resonator. In both series, we found that films with higher T(c), narrower x-ray rocking curve width, and sharper electron channeling pattern tend to have higher microwave resonator Qs. Optimal film growth conditions were inferred from this systematic study. Films grown at higher oxygen pressure have smoother surfaces and fewer second phases.

引用

页码：475 / 482

页数：8

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