LONG-PULSE EXCIMER LASER WITH A VARIABLE REFLECTIVITY MIRROR RESONATOR

被引：14

作者：

MCKEE, TJ

FENDRYKOWSKI, S

机构：

[1] Lumonics Inc., Kanata, ON, K2K 1Y3

来源：

APPLIED OPTICS | 1993年 / 32卷 / 03期

关键词：

D O I：

10.1364/AO.32.000275

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The performance of a 1-J XeCl excimer laser with a variable reflectivity mirror unstable resonator optical cavity is described. The output beam exhibits a flat profile in the near field and a far-field energy distribution with approximately 63% of the energy contained within an angle of 39 mu rad (1/e2 spot size).

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页码：275 / 277

页数：3

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