RANGES AND VARIANCES OF 0.2-1.0 KEV HYDROGEN AND DEUTERIUM IONS IMPLANTED INTO BE, C AND SI

被引：27

作者：

LEBLANC, L

ROSS, GG

机构：

[1] INRS-Énergie et Matériaux, Université du Québec, Varennes, Que. J3X 1S2

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 83卷 / 1-2期

关键词：

D O I：

10.1016/0168-583X(93)95901-G

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The ion beam analysis technique of elastic recoil detection with an electromagnetic filter has been used to measure the mean ranges and variances of 0.2-1.0 keV H and D ions implanted in Be, C and Si. Two corresponding Monte Carlo (BABOUM and TRIM) code calculations have also been performed and compared. Other theoretical and experimental results are included. Power law fits as a function of energy, R(p) = R0E(n), have been adjusted to the ranges and a general function is deduced which allows a rapid estimation of the mean ranges.

引用

页码：15 / 20

页数：6

共 20 条

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