NOX SENSOR USING YBA2CU3O7-DELTA THIN-FILMS

被引：14

作者：

KUDO, S

OHNISHI, H

MATSUMOTO, T

IPPOMMATSU, M

机构：

[1] Fundamental Research Laboratories, Osaka Gas Co., Konohana-ku, Osaka, 554, LTd., 6-19-9, Torishima

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 23卷 / 2-3期

关键词：

HIGH-TEMPERATURE SUPERCONDUCTORS; NITROGEN OXIDE SENSOR; YBCO;

D O I：

10.1016/0925-4005(94)01282-M

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The aim of our study is to develop NOx sensors that can measure NOx concentrations in exhaust gas. The present study investigates the gas-sensing properties of YBa(2)Cu(3)O7-delta thin films, deposited on a SrTiO3 substrate by the ion-beam sputtering method. The thin film we made exhibits high sensitivity to NO at 350 degrees C, and the NO sensitivity increases with NO concentration in the range 30-3000 ppm NO. At 350 degrees C, the Ya(2)Cu(3)O7-delta thin film shows hardly any sensitivity to CO, H-2 and CH4 gases that are also present in exhaust gas, giving it excellent selectivity. It is generally considered that the resistance of YBa2Cu3O7-delta irreversibly increases due to the absorption of NO, but this irreversible increase of the YBa2Cu3O7-delta resistance is not observed in the thin films we made.

引用

页码：219 / 222

页数：4