SILICA COATING OF ALUMINUM NITRIDE PARTICLES BY RADIOFREQUENCY PLASMA CHEMICAL-VAPOR-DEPOSITION

被引:10
作者
TSUGEKI, K [1 ]
YAN, S [1 ]
MAEDA, H [1 ]
KUSAKABE, K [1 ]
MOROOKA, S [1 ]
机构
[1] KYUSHU UNIV,DEPT CHEM SCI & TECHNOL,6-10-1 HAKOZAKI,HIGASHI KU,FUKUOKA 812,JAPAN
关键词
D O I
10.1007/BF02352915
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:43 / 45
页数:3
相关论文
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