RF SPUTTERING OF PLASTICS

被引：61

作者：

MORRISON, DT

ROBERTSON, T

机构：

[1] PLESSEY CO LTD, CAPACITOR DIV, W LOTHIAN, SCOTLAND

[2] CAMERON IRON WORKS LTD, LIVINGSTON, SCOTLAND

来源：

THIN SOLID FILMS | 1973年 / 15卷 / 01期

关键词：

D O I：

10.1016/0040-6090(73)90207-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：87 / 101

页数：15

共 16 条

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[2]

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LAMONT, LT ;

MYERS, DO .

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[4] DIELECTRIC THIN FILMS THROUGH RF SPUTTERING [J].

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MAISSEL, LI .

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[5] POLYMER DIELECTRIC FILMS [J].

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[6] TEMPERATURE COEFFICIENTS OF CAPACITANCE OF SOLIDS [J].

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[7]

HARROP PJ, 1969, T C SPUTTERING MRC B, P106

[8] FRICTION OF SPUTTERED PTFE FILMS [J].

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HARROP, PJ .

THIN SOLID FILMS, 1969, 3 (02) :109-&

[9]

HEIL RH, 1969 T C SPUTT MRC B, P116

[10]

HOLLAND L, 1968, J SCI INSTRUM, V2, P132

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