A CRITICAL-EVALUATION OF LOW-ENERGY ELECTRON-IMPACT CROSS-SECTIONS FOR PLASMA PROCESSING MODELING .2. CF4, SIH4, AND CH4

The available information on low-energy electron impact cross sections for CF4, SiH4, and CH4 is reviewed and critically evaluated. Of interest are the cross sections for momentum transfer, rotational, vibrational, and electronic excitation, dissociation, and attachment and ionization, Recommended cross sections are identified where feasible. Most of the cross sections reviewed have been determined by swarm techniques whereby cross sections are adjusted based on a comparison of predicted and measured electron transport, or swarm, coefficients.