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Baik, van den hove, Roland, Comparative study between gas- and liquid-phase silylation for the diffusion-enhanced silylated resist process, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 9, 6, pp. 3399-3405, (1992)
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Paraszcak, Babich, McGouey, Heidenreich, Hatzakis, J. Shaw Microelec. Eng., 6, pp. 143-160, (1987)
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Weill, Joubert, Paniez, Debaene, Pons, Sage, Microelec Eng, 21, pp. 251-254, (1993)
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Gogolides, Tzevelekis, Tsoi, Goethals, Baik, Van Roey, Hatzakis, J. Vac. Sci. Technol., (1994)
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Dijkstra, SPIE Proceedings, 1466, pp. 592-603, (1991)
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Stewart, Shaw, Scilla, Hatzakis, Paraszczak, Mulhere, IBM Research Report RC144940, #667944, (1989)
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Pons, Joubert, Paniez, Pelletier, J. Appl. Phys., 70, 4, pp. 2376-2379, (1991)
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Joubert, Fiori, Oberlin, Paniez, Pelletier, Pons, Vachette, Weill, J. Appl. Phys., 69, 3, pp. 1697-1703, (1991)
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Babich, Paraszczak, Witman, McGouey, Hatzakis, Shaw, Chou, Microelec. Eng., 11, pp. 503-506, (1990)