OXYGEN-SENSITIVE SURFACE-LAYER IN PT/TIO2 COMPOSITE FILM

被引：9

作者：

ONO, H

MORISAKI, H

HORIIKE, A

YAZAWA, K

机构：

[1] The University of Electro-Communications, Chofu-shi, Tokyo

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 06期

关键词：

Esca; Granular metal; Insulator; Oxygen sensor; Semiconductor;

D O I：

10.1143/JJAP.29.1157

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

It is shown that the surface resistance of Pt/TiO2 composite films is sensitive to oxygen gas at temperatures higher than 130°C. The measured potential distribution along the film surface suggests that there is an oxygen-sensitive high resistance layer in the surface region. According to the results of an ESCA analysis, the high resistance is due to the Pt-free surface layer formed on the Pt/TiO2 granular metal layer. © 1990 The Japan Society of Applied Physics.

引用

页码：1157 / 1158

页数：2