MAGNETIC FORCE MICROSCOPY CURRENT CONTRAST IMAGING - A NEW TECHNIQUE FOR INTERNAL CURRENT PROBING OF ICS

被引:13
作者
CAMPBELL, AN
COLE, EI
DODD, BA
ANDERSON, RE
机构
[1] Department 2275, Failure Analysis, Electronics Quality/Reliability Center, Albuquerque
关键词
D O I
10.1016/0167-9317(94)90050-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This invited paper describes recently reported work on the application of magnetic force microscopy (MFM) to image currents in IC conductors [1]. A computer model for MFM imaging of IC currents and experimental results demonstrating the ability to determine current direction and magnitude with a resolution of approximately 1 mA dc and approximately 1 muA ac are presented. The physics of MFM signal generation and applications to current imaging and measurement are described.
引用
收藏
页码:11 / 22
页数:12
相关论文
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