DAMAGE PROFILING OF AR+-IRRADIATED SI(100) AND GAAS(100) BY MEDIUM ENERGY ION-SCATTERING

被引：28

作者：

KONOMI, I

KAWANO, A

KIDO, Y

机构：

来源：

SURFACE SCIENCE | 1989年 / 207卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(89)90133-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：427 / 440

页数：14

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