EPITAXIAL SYNTHESIS OF DIAMOND BY CARBON-ION DEPOSITION AT LOW-ENERGY

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +

[2] Deryagin B.V., 1970, RUSS CHEM REV+, V39, P783, DOI DOI 10.1070/RC1970V039N09ABEH002022

[3] ION-BEAM STUDIES .1. RETARDATION OF ION-BEAMS TO VERY LOW ENERGIES IN AN IMPLANTATION ACCELERATOR [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 135 (01): : 1 - 11

[4] FREEMAN JH, Patent No. 1485364

[5] FREEMAN JH, 1976, P INT C APPLICATIONS, P75

[6] ION-BEAM-DEPOSITED POLYCRYSTALLINE DIAMONDLIKE FILMS [J]. APPLIED PHYSICS LETTERS, 1976, 29 (02) : 118 - 120

[7] VAVILOV VS, 1974, SOV PHYS SEMICOND+, V8, P471

[8] YAGI K, 1977, P INT C LOW ENERGY I, P136

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +

[2] Deryagin B.V., 1970, RUSS CHEM REV+, V39, P783, DOI DOI 10.1070/RC1970V039N09ABEH002022

[3] ION-BEAM STUDIES .1. RETARDATION OF ION-BEAMS TO VERY LOW ENERGIES IN AN IMPLANTATION ACCELERATOR [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 135 (01): : 1 - 11

[4] FREEMAN JH, Patent No. 1485364

[5] FREEMAN JH, 1976, P INT C APPLICATIONS, P75

[6] ION-BEAM-DEPOSITED POLYCRYSTALLINE DIAMONDLIKE FILMS [J]. APPLIED PHYSICS LETTERS, 1976, 29 (02) : 118 - 120

[7] VAVILOV VS, 1974, SOV PHYS SEMICOND+, V8, P471

[8] YAGI K, 1977, P INT C LOW ENERGY I, P136