SURFACE SPECTROSCOPY WITH HIGH-SPATIAL-RESOLUTION USING METASTABLE ATOMS

被引:32
作者
HARADA, Y
YAMAMOTO, S
AOKI, M
MASUDA, S
ICHINOKAWA, T
KATO, M
SAKAI, Y
机构
[1] UNIV TOKYO,COLL ARTS & SCI,DEPT CHEM,MEGURO KU,TOKYO 153,JAPAN
[2] WASEDA UNIV,DEPT APPL PHYS,SHINJUKU KU,TOKYO 160,JAPAN
[3] JEOL LTD,AKISHIMA,TOKYO 196,JAPAN
关键词
D O I
10.1038/372657a0
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
THE study of surface phenomena is in large part dependent on spectroscopic techniques that are sensitive to of only the outermost few layers of the material under consideration. A variety of such techniques are now available, some of which also have the benefit of high spatial resolution(1-3) Here we show that metastable atoms-that is, atoms in long-lived excited states-can be used as a sensitive surface probe with high spatial resolution. In contrast to electrons or photons, metastable atoms cannot penetrate into a solid; instead, they are de-excited readily following interaction with the surface electronic orbitals(4,5). The de-excitation process is accompanied by the emission of electrons, the energy spectrum of which provides fundamental information about the electronic properties of the surface. High spatial resolution (in the present case, about 5 mu m) is achieved by detecting electrons that have been emitted from only a small area of the sample. As the metastable atoms have only thermal kinetic energies, they are essentially nondestructive, making them ideally suited to probing fragile surfaces such as organic layers and biological specimens.
引用
收藏
页码:657 / 659
页数:3
相关论文
共 18 条
[1]   UV PHOTOELECTRON VALENCE BAND STUDIES ON PHTHALOCYANINE COMPOUNDS [J].
BATTYE, FL ;
GOLDMANN, A ;
KASPER, L .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1977, 80 (02) :425-432
[2]   PENNING-IONIZATION ELECTRON-SPECTROSCOPY OF CHEMISORBED CO [J].
CONRAD, H ;
ERTL, G ;
KUPPERS, J ;
WANG, SW ;
GERARD, K ;
HABERLAND, H .
PHYSICAL REVIEW LETTERS, 1979, 42 (16) :1082-1086
[3]   HIGH-FLUX BEAM SOURCE OF THERMAL RARE-GAS METASTABLE ATOMS [J].
FAHEY, DW ;
PARKS, WF ;
SCHEARER, LD .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1980, 13 (04) :381-383
[4]  
GRIFFITH OH, 1991, ULTRAMICROSCOPY, V36, P262, DOI 10.1016/0304-3991(91)90155-Y
[5]   EXCITED-ATOM DEEXCITATION SPECTROSCOPY USING INCIDENT IONS [J].
HAGSTRUM, HD .
PHYSICAL REVIEW LETTERS, 1979, 43 (14) :1050-1053
[6]   PENNING IONIZATION ELECTRON SPECTOSCOPY - ITS APPLICATION TO SURFACE CHARACTERIZATION OF ORGANIC-SOLIDS [J].
HARADA, Y ;
OZAKI, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (08) :1201-1214
[7]   X-RAY PHOTOELECTRON VALENCE BAND STUDIES ON PHTHALOCYANINE COMPOUNDS [J].
HOCHST, H ;
GOLDMANN, A ;
HUFNER, S ;
MALTER, H .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1976, 76 (02) :559-568
[8]   HOT, METASTABLE ATOM, MOLECULAR-BEAM SOURCE [J].
LEASURE, EL ;
MUELLER, CR ;
RIDLEY, TY .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1975, 46 (05) :635-637
[9]  
MASUDA S, 1990, J ELECTRON SPECTROSC, V51, P167
[10]   SPATIAL-DISTRIBUTION OF THE WAVE-FUNCTIONS OF A GRAPHITE SURFACE STUDIED BY USE OF METASTABLE-ATOM ELECTRON-SPECTROSCOPY [J].
MASUDA, S ;
HAYASHI, H ;
HARADA, Y .
PHYSICAL REVIEW B, 1990, 42 (06) :3582-3585