RECONSTRUCTIONS OF GAAS AND AIAS SURFACES AS A FUNCTION OF METAL TO AS RATIO

被引:143
作者
BACHRACH, RZ
BAUER, RS
CHIARADIA, P
HANSSON, GV
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期
关键词
D O I
10.1116/1.571059
中图分类号
O59 [应用物理学];
学科分类号
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页码:335 / 343
页数:9
相关论文
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