INSITU FTIR DIAGNOSTICS OF THE RADIO-FREQUENCY PLASMA DECOMPOSITION OF N2O

被引：15

作者：

CLELAND, TA

HESS, DW

机构：

[1] Univ of California, Berkeley, CA,, USA, Univ of California, Berkeley, CA, USA

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1987年 / 7卷 / 04期

关键词：

NITROGEN COMPOUNDS - PLASMAS - Applications - SPECTROSCOPY; INFRARED; -; Applications;

D O I：

10.1007/BF01030485

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

The decomposition of N//2O in a 13. 56-MHz parallel-plate system was studied using in situ Fourier transform infrared (FTIR) spectroscopy. Areas of two infrared absorption bands of N//2O recorded at 8 cm** minus **1 resolution were used to estimate relative gas-phase dissociation as a function of rf power and flow rate at 500 mT. Flow rate was found to strongly affect band areas over the range of powers investigated (10-90 W). The effect of rf power on band areas diminished above 40 W, probably due to poor plasma confinement. Distortion of the band shapes by the plasma permitted rotational temperatures to be estimated.

引用

页码：379 / 394

页数：16

共 32 条

[1]

BARROW GM, 1962, INTRO MOL SPECTROSCO

[2] A SPECTROSCOPIC INVESTIGATION OF THE OCS DISCHARGE SYSTEM [J].