THE EFFECTS OF GRAIN-SIZE GRADIENTS ON THE STABILITY OF THIN-FILMS

被引:12
作者
HACKNEY, SA
机构
[1] Michigan Technological Univ,, Houghton, MI, USA, Michigan Technological Univ, Houghton, MI, USA
来源
SCRIPTA METALLURGICA | 1988年 / 22卷 / 08期
基金
美国国家科学基金会;
关键词
GOLD METALLOGRAPHY - Grain Size and Shape - METALLOGRAPHY - Grain Size and Shape - METALS AND ALLOYS - Thin Films;
D O I
10.1016/S0036-9748(88)80145-5
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
The morphological (shape) stability of thin films is of importance to a number of industries which rely on two-dimensional microstructural components. The structural breakup of thin films due to capillary shape instabilities at moderate temperatures where surface or interface diffusion is significant is an important technological concern. Many thin films produced by sputter deposition or high supersaturation chemical or physical vapor deposition have a small grain size and therefore high driving forces for grain growth. The purpose of this note is to consider the effect a non-homogeneous grain size distribution, as might result from abnormal grain growth, has on the morphological stability of thin polycrystalline films. The theoretical results are applied to a polycrystalline Au-Pd thin film grown by sputter deposition onto an electron transparent amorphous carbon substrate and heated in-situ in a hot stage at 600 degree C for 5 minutes. 3 Refs.
引用
收藏
页码:1273 / 1276
页数:4
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