PROPERTIES OF THIN POLYIMIDE FILMS

被引：144

作者：

ROTHMAN, LB

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 10期

关键词：

D O I：

10.1149/1.2129377

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2216 / 2220

页数：5

共 9 条

[1]

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[5]

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[7] NOVEL PLANAR MULTILEVEL INTERCONNECTION TECHNOLOGY UTILIZING POLYIMIDE [J].

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[8]

Yen J. C., 1975, Electrochemical Society Fall Meeting (Extended abstracts only received), P444

[9]

ZIELINSKI LB, 1976, Patent No. 3985597

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