SENSITIVE HIGH-T-C TRANSITION EDGE BOLOMETER ON A MICROMACHINED SILICON MEMBRANE

被引:41
作者
NEFF, H
LAUKEMPER, J
KHREBTOV, IA
TKACHENKO, AD
STEINBEISS, E
MICHALKE, W
BURNUS, M
HEIDENBLUT, T
HEFLE, G
SCHWIERZI, B
机构
[1] SI VAVILOV STATE OPT INST,ST PETERSBURG 199034,RUSSIA
[2] INST PHYS HOCHTECHNOL,D-07743 JENA,GERMANY
[3] UNIV HANNOVER,INST HALBLETERTECHNOL & WERKSTOFFE ELEKTROTECH,D-30167 HANNOVER,GERMANY
关键词
D O I
10.1063/1.113960
中图分类号
O59 [应用物理学];
学科分类号
摘要
Superconducting transition edge bolometers on micromachined silicon membranes have been fabricated. The optical response is 580 V/W at a time constant of 0.4 ms. The detectivity D* is 3.8×109(cm Hz1/2 W-1) at a temperature of 84.5 K and within the frequency regime 100<f<300 Hz. This is one of the fastest composite type bolometers ever reported. Upon thermal optimization, this type of detector should be competitive with state-of-the-art quantum detectors.© 1995 American Institute of Physics.
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页码:2421 / 2423
页数:3
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