PLASMA SECONDARY-NEUTRAL AND SECONDARY-ION MASS-SPECTROMETRY INVESTIGATIONS ON CERAMIC/COPPER POWDER PELLETS

As a preliminary quantification study on ceramic materials using electron gas (or plasma) secondary-neutral mass spectrometry, matrix effects are demonstrated in terms of relative element sensitivity factors which are obtained from Cu pellets containing the ceramic powders AlN, BN, TiN, Si9N4O6, B4C and SiC. Additionally, measurement conditions are varied within the range of typical practical conditions. Matrix and instrumental effects are discussed on the background of ''usual'', energy, negative secondary ion and negatively post-ionized sputtered neutral spectra yielding evidence that the emission of not only molecular, but also thermal and negative particles has to be included into the evaluation of matrix effects. The negative mode using direct Ar+ bombardment from the plasma is introduced into plasma secondary-neutral and secondary-ion mass spectrometry.