A THIN-FILM PYROELECTRIC DETECTOR

被引:21
作者
BELL, A
HUANG, Y
PAUL, O
NEMIROVSKY, Y
SETTER, N
机构
[1] ETH ZURICH,PHYS ELECTR LAB,ZURICH,SWITZERLAND
[2] TECHNION ISRAEL INST TECHNOL,DEPT ELECTR ENGN,HAIFA,ISRAEL
关键词
D O I
10.1080/10584589508019367
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A dual element, point, infra-red detector is being developed from a sol-gel deposited PbTiO3 thin-film on a micro-machined silicon substrate. Patterning of the ferroelectric film and the electrodes is accomplished by photolithographic techniques. Membranes to reduce the thermal conduction from the sensor elements are created in the underlying substrate by anisotropic etching of the silicon. The measured voltage responsivity (R(V)) as a function of radiation modulation frequency is compared to theoretical predictions and to conventional pyroelectric detector characteristics. Optimisation of the performance with respect to the device design is discussed.
引用
收藏
页码:231 / 240
页数:10
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