DEVELOPMENT AND EVOLUTION OF THIN-FILM MICROSTRUCTURES - A MONTE-CARLO APPROACH

被引：11

作者：

LING, S

ANDERSON, MP

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1988年 / 17卷 / 05期

关键词：

D O I：

10.1007/BF02652133

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：459 / 466

页数：8

共 22 条

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