MECHANISM FOR NITRIDATION OF FE-CONTAMINATED SILICON

被引：107

作者：

BOYER, SM

MOULSON, AJ

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1978年 / 13卷 / 08期

关键词：

D O I：

10.1007/BF00548727

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1637 / 1646

页数：10

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