OBSERVATION OF LOMER-COTTRELL LOCKS IN SIGE STRAINED LAYERS

被引：3

作者：

FERRET, P ^{[1
]}

ROBINSON, BJ ^{[1
]}

THOMPSON, DA ^{[1
]}

BARIBEAU, JM ^{[1
]}

机构：

[1] NATL RES COUNCIL CANADA,OTTAWA K1A 0R6,ONTARIO,CANADA

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 21期

关键词：

D O I：

10.1063/1.103896

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Misfit dislocations in the SiGe system are usually not dissociated. We present the first observation of a Lomer-Cottrell lock array in a Si/Si 1-xGex/Si heterostructure (0.4<x<0.6). We describe the character of the stacking faults and the partial dislocations which form the locks.

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页码：2220 / 2221

页数：2

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