2-DIMENSIONAL POSITION-SENSITIVE PHOTODETECTOR WITH HIGH LINEARITY MADE WITH STANDARD IC-TECHNOLOGY

被引:30
作者
NOORLAG, DJW
MIDDELHOEK, S
机构
来源
IEE JOURNAL ON SOLID-STATE AND ELECTRON DEVICES | 1979年 / 3卷 / 03期
关键词
D O I
10.1049/ij-ssed.1979.0018
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper a novel reverse-biased p. s. d. (position-sensitive detector) is presented. A 6 multiplied by 6 mm**2 p. s. d. was made, and an overall linearity better than 0. 5% full scale and a photosensitivity of 0. 5 A/W for an He-Ne laser were obtained. The dependence of the position sensitivity on background illumination and temperature as well as resolution are similar to those of currently known linear p. s. d. s.
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页码:75 / 82
页数:8
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