The advent of large scale air pollution studies and the use of silicon (energy dispersive) X-ray detectors has led to the need for new standards for calibration. These standards should be thin rather than the infinitely thick standards which have been the usual calibration tool of the past. The small particle size of the usual particulate sample reduces the need for absorption corrections and makes the use of very thin standards desirable. It is possible to produce these standards on a variety of backings and mountings so that they are compatible with most of the equipment in use. Standard gravimetric techniques are sufficient to achieve accuracies comparable with the limits imposed by the sampling techniques employed and the counting statistics obtained. The use of single element standards avoids the problems of interferences and allows for the accurate use of spectrum stripping routines. Isotopic targets may be analyzed for impurity elements using this simple, non-destructive technique. © 1979.