THE CHARACTERIZATION OF AN IMAGING TIME-OF-FLIGHT SECONDARY ION MASS-SPECTROMETRY INSTRUMENT

被引:49
作者
ECCLES, AJ [1 ]
VICKERMAN, JC [1 ]
机构
[1] UNIV MANCHESTER,INST SCI & TECHNOL,SURFACE ANAL RES CTR,MANCHESTER M60 1QD,LANCS,ENGLAND
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期
关键词
D O I
10.1116/1.576125
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:234 / 244
页数:11
相关论文
共 17 条
  • [1] ANDERSEN HH, 1981, SPRINGER TOPICS APPL, V47, P143
  • [2] BLETSOS IV, 1986, SPRINGER P PHYS, V9, P74
  • [3] BRIGGS D, 1986, VACUUM, V36, P105
  • [4] A STUDY OF POLYESTER MODEL COMPOUNDS BY MS, QUADRUPOLE SIMS, TOF SIMS AND LMMS
    BRONSEMA, KD
    BIEMOND, MEF
    VANDEVEN, FJM
    BROWN, A
    HUMPHREY, P
    ECCLES, J
    [J]. SURFACE AND INTERFACE ANALYSIS, 1988, 12 (1-12) : 472 - 472
  • [5] A COMPARISON OF ATOM AND ION INDUCED SSIMS - EVIDENCE FOR A CHARGE INDUCED DAMAGE EFFECT IN INSULATOR MATERIALS
    BROWN, A
    VANDENBERG, JA
    VICKERMAN, JC
    [J]. SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1985, 40 (5-6) : 871 - 877
  • [6] A COMPARISON OF POSITIVE AND NEGATIVE-ION STATIC SIMS SPECTRA OF POLYMER SURFACES
    BROWN, A
    VICKERMAN, JC
    [J]. SURFACE AND INTERFACE ANALYSIS, 1986, 8 (02) : 75 - 81
  • [7] CASTAING R, 1960, P EUR REG C ELECTRON, V1, P169
  • [8] A COMPARATIVE-STUDY OF SIMS DEPTH PROFILING OF BORON IN SILICON
    CLEGG, JB
    MORGAN, AE
    DEGREFTE, HAM
    SIMONDET, F
    HUBER, A
    BLACKMORE, G
    DOWSETT, MG
    SYKES, DE
    MAGEE, CW
    DELINE, VR
    [J]. SURFACE AND INTERFACE ANALYSIS, 1984, 6 (04) : 162 - 166
  • [9] DAVIES MC, IN PRESS SURF INTERF
  • [10] DAVIES MC, IN PRESS ANAL CHEM